Functional Devices

Prof. Hiroshi Nakashima

Director / Prof. Hiroshi Nakashima

This project division conducts researches on group IV semiconductors, thin films, novel processing, and advanced-functional devices matching requirements from the advanced semiconductor industry. This project division also promotes the advanced and creative research projects related to "semiconductor" on the platform between industry and academic, contributing the realization of a highly progressive information society. A clean room and advanced facilities are well established, which provide suitable circumstances for advanced semiconductor researches.

Research Contents

This project division promotes the following 5 researches.

  1. R & D for Si/Ge CMOS process and devices
  2. Ge optoelectronics - R & D of photo-emitter and detector
  3. R & D for Ge tunnel FET for low voltage operation
  4. R & D of SiC devices for high temperature operation
  5. R & D of electronic devices using 2D material (collaborative research with Prof. Ago lab. in GIC)
Our research subjects

Our research subjects

Project name:

Development of Processing and Device for Advanced ULSI Contribute to Sophisticated Information Society

Project leader:

Director / Prof. Hiroshi Nakashima

3F, GIC Bldg., Chikushi Campus
PHONE : +81-92-583-7872
FAX : +81-92-583-8962
mail

Associate Prof. Dong Wang

International Education promoter, Interdisciplinary Graduate School of Engineering and Sciences, Kyushu Univ.

3F, IGSES Bldg., Chikushi Campus
PHONE : +81-92-583-7637
FAX : +81-92-583-8962
mail

Assistant Prof. Keisuke Yamamoto

Interdisciplinary Graduate School of Engineering and Sciences, Kyushu Univ.

5F, GIC Bldg., Chikushi Campus
PHONE : +81-92-583-7292
FAX : +81-92-583-8962
mail

KOINE Research Platform:Functional Devices

The Crystalline 3C-SiC is possible to be epitaxial growth on Si, and the 3C-SiC device is possible to use the Si-compatible process, which enable us to low cost fabrication. This platform aims to establish the growth of high quality 3C-SiC on Si and to develop the 3C-SiC device, leading to high temperature operation.

Adopted Projects

  1. Grant of Knowledge Cluster Initiative implemented by MEXT (Fukuoka regional conception for development of advanced system LSI), Leader, FY2007-2011.
  2. Cooperative research with Semiconductor Technology Academic Research Center (STARC), Group leader (Leader: M. Miyao), FY2007-2009.

Adopted Scientific Funds (JSPS Grant-in-Aid for Scientific Research / KAKENHI)

  1. Scientific Research (B), Leader: D. Wang, FY2017-2019.
  2. Scientific Research (B), Leader: D. Wang, FY2014-2016.
  3. Scientific Research (A), Leader: H. Nakashima, FY2013-2015.
  4. Challenging Exploratory Research, Leader: H. Nakashima, FY2013-2014.
  5. Scientific Research (A), Leader: H. Nakashima, FY2009-2011.

Other Adopted programs

  1. MEXT, Leading Initiative for Excellent Young Researchers (LEADER), K. Yamamoto, FY2016-2020.
Clean room at GIC

Clean room at GIC

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