Prof. Dong Wang
Associate Prof. Keisuke Yamamoto
This project division conducts researches on group IV semiconductors, thin films, novel processing, and advanced-functional devices matching requirements from the advanced semiconductor industry.This project division also promotes the advanced and creative research projects related to "semiconductor" on the platform between industry and academic, contributing the realization of a highly progressive information society.
A clean room and advanced facilities are well established, which provide suitable circumstances for advanced semiconductor researches.
Our research subjects
Project name:
Chief administrator:
Prof. Reiji Hattori
6F, GIC Bldg., Chikushi Campus
Cooperating Researchers:
Prof. Dong Wang
Interdisciplinary Graduate School of Engineering and Sciences,
Kyushu Univ.
Room 415, Faculty of Engineering Sciences building D,
Chikushi Campus
Cooperating Researchers:
Associate Prof. Keisuke Yamamoto
Interdisciplinary Graduate School of Engineering and Sciences,
Kyushu Univ.
Room 416, Faculty of Engineering Sciences building D,
Chikushi Campus
This project division promotes the following 4 researches.
The Crystalline 3C-SiC is possible to be epitaxial growth on Si, and the 3C-SiC device is possible to use the Si-compatible process, which enable us to low cost fabrication. This platform aims to establish the growth of high quality 3C-SiC on Si and to develop the 3C-SiC device, leading to high temperature operation.
Clean room at GIC