Oxide TFT fabrication facility (Ito campus)
Dry process:
Sputter, Dry Etcher, CVD, Annealer
Wet process:
Wet Etcher, Remover, Glass Cleaner, Mask Cleaner
Lithography process
Mask Aligner, Spin Coater, Developer, Bakeout oven
printing process
Spin coater, Screen Printer, Ink-Jet printer, Encapsulation system
2nd Cleanroom (GIC)
Electric device measurement room
Electronic workshop
Softwears
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- JDAT : SX-Meister, Ismo, Asca
- CADENCE : OrCAD, Virtuoso, Allegro
- SILVACO : TCAD, Analog/Mixed Signal/RF, Custom IC CAD
- INFOLYTICA : ElecNet, MagNet
- MATHWORKS : MATLAB, Symulinks