Oxide TFT fabrication facility (Ito campus)

Dry process:

Sputter, Dry Etcher, CVD, Annealer

Wet process:

Wet Etcher, Remover, Glass Cleaner, Mask Cleaner

Lithography process

Mask Aligner, Spin Coater, Developer, Bakeout oven

printing process

Spin coater, Screen Printer, Ink-Jet printer, Encapsulation system

2nd Cleanroom (GIC)

Electric device measurement room

Electronic workshop

Softwears

    • JDAT : SX-Meister, Ismo, Asca
    • CADENCE : OrCAD, Virtuoso, Allegro
    • SILVACO : TCAD, Analog/Mixed Signal/RF, Custom IC CAD
    • INFOLYTICA : ElecNet, MagNet
    • MATHWORKS : MATLAB, Symulinks