1F Cleanroom 1
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Annealing system | |
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Rapid thermal annealing (RTA) system |
Furnaces for oxidation and annealing |
Furnace for wet oxidation and diffusion |
Furnace for high temperature annealing |
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Others | |
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Mask aligner (Mikasa Co. Ltd.) |
Mask aligner (DNP Co. Ltd.) |
Reactive ion etching system |
Clean bench |
Elipsometory |
Optical microscope |
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